Description
MKS 626BX13TDE
High-accuracy, temperature-controlled capacitance manometer delivering reliable, drift-free vacuum measurement for demanding process environments
| Brand | MKS |
| Model | 626BX13TDE |
| Voltage | ±15 V DC |
| Country of Origin | United States |
| Weight | 0.6 kg |
| Dimensions | 127 x 38 x 38 mm |
| Warranty | 12 months |
| Certifications | CE, RoHS, SEMI S2 |
| SKU / MPN | 626BX13TDE |
| What’s in the box | 626BX13TDE Vacuum Gauge, calibration certificate, user manual, protective cap |
| Gauge Type | Heated Capacitance Manometer (Baratron) |
| Full Scale Range | 10 Torr |
| Accuracy | 0.25% of Reading |
| Operating Temperature | 45°C (heated, controlled) |
| Output Signal | 0–10 V DC linear |
| Fitting | 1/2 inch VCR (Swagelok compatible) |
Key benefits: Exceptional 0.25% accuracy, heated 45°C sensor for zero drift, fast response time, robust stainless-steel construction, SEMI-compliant for semiconductor use, long-term calibration stability
Typical applications: Semiconductor process chambers, thin-film deposition, etch and CVD tools, vacuum furnace control, research laboratories, high-purity gas delivery systems
Lifecycle: Active product, supported by MKS Instruments with long-term availability for installed-base service and spares
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
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Individually inspected
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Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
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Robert M. –
The stepper motor is smooth and quiet. Will use this supplier again.