Description
Advanced Energy Apex 1513
Reliable high-power 1.5kW RF generator for precision plasma processes in semiconductor and industrial applications
| Brand | Advanced Energy |
| Model | Apex 1513 |
| Voltage | 208V AC, single phase |
| Country of Origin | USA |
| Weight | 15.9 kg (35 lbs) |
| Dimensions | 88 x 483 x 508 mm (3.5 x 19 x 20 in) |
| Warranty | 90 days (used item) |
| Certifications | CE, UL, RoHS |
| SKU / MPN | Apex 1513 |
| What’s in the box | Apex 1513 RF Generator unit, power cable, user manual (CD) |
| Frequency | 13.56 MHz |
| Output Power | 1500 W (1.5 kW) |
| Frequency Accuracy | ±0.005% |
| RF Output Connector | Type N female |
| Cooling | Forced air |
| Interface | Analog, RS-232/RS-485, DeviceNet, EtherCAT optional |
Key benefits: High frequency stability, compact design, advanced arc handling, flexible communication interfaces, robust thermal management, proven semiconductor-grade reliability
Typical applications: Plasma etching, PECVD, PVD sputtering, plasma-enhanced deposition, semiconductor wafer processing, flat panel display manufacturing, solar cell production, R&D plasma research
Lifecycle: Mature product, supported by Advanced Energy service network, refurbished/used units offer cost-effective alternative
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
Run Business
Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.
Patricia E. –
Reliable PLC module, works flawlessly in our testing environment.