Description
MPS SPECTRUM 11002-07160
Reliable refurbished RF power supply for precision plasma processes in semiconductor and industrial manufacturing
| Brand | MPS |
| Model | SPECTRUM 11002-07160 |
| Voltage | 208/400V AC, 3-Phase |
| Country of Origin | United States |
| Weight | 42 kg |
| Dimensions | 483 x 533 x 178 mm (19" Rack Mount) |
| Warranty | 6 months |
| Certifications | CE, UL, RoHS, SEMI |
| SKU / MPN | SPECTRUM 11002-07160 |
| What’s in the box | RF Power Supply Unit, Power Cable, User Manual, Connector Kit |
| Output Frequency | 13.56 MHz (ISM Band) |
| Output Power | 1600 W (1.6 kW) |
| Output Voltage | 0-2000 V DC |
| Input Voltage | 208/400 VAC, 3-Phase |
| Cooling Type | Forced Air Cooling |
| Communication Interface | Analog/Digital I/O, RS-232/485 |
Key benefits: Stable 13.56 MHz frequency output, 1600W high power capacity, compact 3U rack design, broad process compatibility, cost-effective used condition with tested performance
Typical applications: Semiconductor plasma etching, thin-film deposition, PECVD processes, sputtering systems, photovoltaic manufacturing, R&D plasma research
Lifecycle: Mature product line, service and replacement parts available through MPS support channels
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
Run Business
Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.
David L. –
The servo amplifier performed well in velocity mode. Documentation was helpful.