Description
Lam RESEARCH RF Power Supply Model 853-064887-010 – Efficient Energy
High-efficiency RF power supply for semiconductor manufacturing processes
| Brand | Lam Research |
| Model | 853-064887-010 |
| Voltage | 380-480V AC |
| Country of Origin | United States |
| Weight | 15 kg |
| Dimensions | 400 x 300 x 200 mm |
| Warranty | 2 years |
| Certifications | CE, UL, RoHS |
| SKU / MPN | 853-064887-010 |
| What’s in the box | RF Power Supply, power cable, user manual, mounting brackets |
| Output Power | 3 kW |
| Frequency Range | 13.56 MHz |
| Efficiency | 92% |
| Cooling Method | Forced air |
| Operating Temperature | 0 to +50°C |
| Protection Class | IP54 |
Key benefits: Optimized for plasma etching and deposition applications, ensures stable and reliable RF power delivery, reduces energy consumption
Typical applications: Semiconductor fabrication, plasma etching, chemical vapor deposition (CVD)
Order number: Lam RESEARCH RF Power Supply Model 853-064887-010 – Efficient Energy
Lifecycle: Active
Documentation: Online PDF
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
Run Business
Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.
Kevin H. –
The stepper motor is smooth and quiet. Will use this supplier again.