Description
Brooks Instrument 5853E
High-precision thermal mass flow meter for reliable gas flow measurement in industrial and process applications
| Brand | Brooks Instrument |
| Model | 5853E |
| Voltage | 24V DC |
| Country of Origin | USA |
| Weight | 1.5 kg |
| Dimensions | 150 x 80 x 60 mm |
| Warranty | 6 months |
| Certifications | CE, ATEX, IECEx, RoHS, ISO 9001 |
| SKU / MPN | 5853E |
| What’s in the box | Mass Flow Meter unit, calibration certificate, user manual, connectors |
| Flow Range | 0-10 sccm to 0-1000 slpm |
| Accuracy | ±0.5% of reading |
| Repeatability | ±0.1% of full scale |
| Output Signal | 4-20 mA, RS-485, Modbus RTU |
| Fluid Compatibility | Clean, dry, non-corrosive gases |
| Process Connection | 1/4″ VCR, 1/2″ compression fittings |
Key benefits: Exceptional accuracy, fast response time, multi-gas capability, digital communication, low pressure drop, long-term stability
Typical applications: Semiconductor manufacturing, analytical instrumentation, bioreactor gas control, HVAC systems, research laboratories, gas blending systems
Lifecycle: Active product with 10+ years of availability and long-term support
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
Run Business
Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.







Mark O. –
Excellent support when we had integration questions. The product met our standards.