Description
ASML Semiconductor Parts Model 4022.636.78564 for Chipmaking
High-precision optical component for advanced lithography systems, ensuring nanometer-level chip patterning accuracy.
| Brand | ASML |
| Model | 4022.636.78564 |
| Voltage | Not specified |
| Country of Origin | Netherlands |
| Weight | 0.12 kg |
| Dimensions | 50 mm x 25 mm x 15 mm |
| Warranty | 1 year |
| Certifications | CE, SEMI S2, RoHS |
| SKU / MPN | 4022.636.78564 |
| What’s in the box | 1x Semiconductor Part (as specified), 1x Anti-static Bag, 1x Certificate of Conformance |
| Component Type | Optical sensor module |
| Wavelength Range | 193 nm to 248 nm |
| Operating Temperature | 20°C to 25°C |
| Resolution | < 0.1 nm |
| Material | Fused silica with anti-reflective coating |
| Compatibility | ASML TWINSCAN NXT systems |
Key benefits: Exceptional optical clarity, minimal thermal drift, direct replacement for ASML maintenance kits, extends system uptime.
Typical applications: Semiconductor wafer steppers, photolithography exposure units, critical dimension measurement tools.
Order number: ASML Semiconductor Parts Model 4022.636.78564 for Chipmaking
Lifecycle: Active
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
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Orders usually ship the same day
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Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
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Andrew C. –
Fast delivery and well packed. The servo drive performs exactly as specified.