Description
AMAT 0010-63792 WG3D401R2
High-throughput vacuum load lock module for Applied Materials wafer processing platforms, enabling rapid substrate transfer without breaking process vacuum.
| Brand | AMAT |
| Model | 0010-63792 WG3D401R2 |
| Voltage | 208-240V AC |
| Country of Origin | United States |
| Weight | 45 kg |
| Dimensions | 600 x 500 x 400 mm |
| Warranty | 6 months |
| Certifications | CE, SEMI S2, UL |
| SKU / MPN | 0010-63792 WG3D401R2 |
| What’s in the box | Load Lock assembly, mounting hardware, interface cables, installation manual |
| Product Type | Load Lock Module |
| Compatible Platform | Applied Materials Endura / Centura |
| Wafer Size | 200 mm / 300 mm |
| Pump Port | ISO-K 100 |
| Vacuum Level | 10^-7 Torr (base) |
| Material | Anodized Aluminum |
Key benefits: Enables fast wafer transfer, maintains ultra-high vacuum integrity, OEM-compatible design, reduces particle contamination, robust construction for 24/7 fab operation
Typical applications: Semiconductor wafer fabrication, PVD/CVD process chambers, etch and deposition systems, R&D vacuum processing
Lifecycle: Active, OEM-supported with long-term availability
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
Run Business
Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.








David L. –
Reliable PLC module, works flawlessly in our testing environment.