Description
Novellus SIGMA 5 02-408299-00
High-precision robot controller designed for semiconductor wafer handling and cleanroom automation environments
| Brand | Novellus |
| Model | SIGMA 5 02-408299-00 |
| Voltage | 24V DC / 110-220V AC |
| Country of Origin | USA |
| Weight | 4.5 kg |
| Dimensions | 320 x 220 x 110 mm |
| Warranty | 12 months |
| Certifications | CE, UL, RoHS, SEMI S2 |
| SKU / MPN | 02-408299-00 |
| What’s in the box | SIGMA 5 Robot Controller unit, mounting brackets, power cable, I/O connector kit, user manual, programming software CD |
| Controller Type | Multi-axis Robot Controller |
| Compatible Robots | Novellus wafer handling robots and SCARA arms |
| Communication | RS-232, RS-422/485, Ethernet, DeviceNet |
| Axis Control | Up to 6 axes synchronized motion |
| Programming | Teach pendant and graphical HMI interface |
| Operating Environment | Cleanroom Class 1-100 compatible |
Key benefits: Multi-axis synchronized motion control, SEMI-compliant communication interfaces, cleanroom-ready design, reliable long-term operation in fab environments, easy integration with Novellus equipment platforms
Typical applications: Semiconductor wafer transfer, FOUP/FOSB handling, cleanroom robotic automation, wafer inspection stations, load lock systems, semiconductor manufacturing tool integration
Lifecycle: Mature product, supported for installed base with available spare parts and service contracts
Our Advantages
Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don't worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitive pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
Run Business
Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.







Michael T. –
The power supply unit is stable under full load. Better than expected.